Simultaneous capturing of overlay signals from multiple targets

US10401228B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Andrew V. Hill · Chino Hills, US
• Amnon Manassen · Haifa, IL
• Yuri Paskover · Or Akiva, IL
• Yuval Lubashevsky · Haifa, IL

Key dates

• Filing date: Aug 1, 2018
• Grant date: Sep 3, 2019
• Expiry date: Aug 1, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70633
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Metrology methods and systems are provided, in which the detected image is split at a field plane of the collection path of the metrology system's optical system into at least two pupil plane images. Optical elements such as prisms may be used to split the field plane images, and multiple targets or target cells may be measured simultaneously by spatially splitting the field plane and/or the illumination sources and/or by using two polarization types. The simultaneous capturing of multiple targets or target cells increases the throughput of the disclosed metrology systems.