Inventor · Or Akiva, IL

Yuri Paskover

29Patents
5h-index
46Co-inventors
61Inventor score

Filing activity: Oct 30, 2015 → Feb 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10197389B2 Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields Physics 13 Active
US9864209B2 Self-moire target design principles for measuring unresolved device-like pitches Physics 9 Active
US10190979B2 Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures Physics 8 Active
US10048132B2 Simultaneous capturing of overlay signals from multiple targets Physics 8 Active
US10824079B2 Diffraction based overlay scatterometry Physics 7 Active
US10401228B2 Simultaneous capturing of overlay signals from multiple targets Physics 4 Active
US11378394B1 On-the-fly scatterometry overlay metrology target Physics 4 Active
US10677588B2 Localized telecentricity and focus optimization for overlay metrology Physics 4 Active
US11119417B2 Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s) Physics 3 Active
US10520832B2 Topographic phase control for overlay measurement Electricity 2 Active
US10444161B2 Systems and methods for metrology with layer-specific illumination spectra Physics 2 Active
US12001148B2 Enhancing performance of overlay metrology Electricity 1 Active
US11592755B2 Enhancing performance of overlay metrology Electricity 1 Active
US10579768B2 Process compatibility improvement by fill factor modulation Electricity 1 Active
US11314173B2 Topographic phase control for overlay measurement Electricity 1 Active
US11841621B2 Moiré scatterometry overlay Physics 1 Active
US11409205B2 Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices Electricity 1 Active
US10101592B2 Self-moiré target design principles for measuring unresolved device-like pitches Physics 1 Active
US10408602B2 Quality estimation and improvement of imaging metrology targets Physics 0 Active
US11101153B2 Parameter-stable misregistration measurement amelioration in semiconductor devices Electricity 0 Active
US10139528B1 Compound objectives for imaging and scatterometry overlay Physics 0 Active
US11852590B1 Systems and methods for metrology with layer-specific illumination spectra Physics 0 Active
US11281111B2 Off-axis illumination overlay measurement using two-diffracted orders imaging Physics 0 Active
US12222199B2 Systems and methods for measurement of misregistration and amelioration thereof Electricity 0 Active
US12422363B2 Scanning scatterometry overlay metrology Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.