Modular substrate heater for efficient thermal cycling
US10403521B2 · kind B2 · utility
0Cited by
10References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 4, 2014 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Jun 1, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate heater for a substrate processing chamber which includes a substrate support for a substrate processing chamber which includes a body having a top plate with a substrate receiving surface, and a movable heater disposed in the body, the heater being movable relative to the top plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.