Methods and apparatuses for wireless communication with a brush
US10405166B2 · kind B2 · utility
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1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 2018 |
| Grant date | Sep 3, 2019 |
| Priority date | — |
| Expiry date | Aug 29, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67294
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.