Structure of gas sensor
US10408780B2 · kind B2 · utility
0Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2017 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Jun 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/128
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a structure of a gas sensor, comprising: a support, having a front side, a back side opposite to the front side, a cell region, and a peripheral region circling the cell region; a cavity, formed on the back side of the support in the cell region; a heater, disposed on the front side of the support covering the cavity; a sensing element, disposed on the heater; and a sealing layer, formed on the back side of the support covering inside the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.