Reverse power reducing method and plasma power apparatus using the same
US10410834B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2019 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Mar 29, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F2200/451
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for reducing reverse power reflected from a plasma load to a high frequency power amplifier includes determining a sign of a slope of an output frequency outputted from the high frequency power amplifier; determining a sign of a slope of reverse power reflected from the plasma load to the high frequency power amplifier; deciding an increase or a decrease in an amount of frequency change according to a combination of the sign of the slope of the output frequency and the sign of the slope of the reverse power; updating the output frequency by using the amount of the frequency change, and changing the output frequency in order to escape from a hump when a reflection coefficient is larger than a predetermined reflection reference value and the amount of the frequency change is smaller than a predetermined variation width setting value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.