Waffer pedestal and support structure thereof
US10410909B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2018 |
| Grant date | Sep 10, 2019 |
| Priority date | — |
| Expiry date | Sep 17, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention discloses a support structure for a wafer pedestal; particularly the wafer pedestal has a wafer carrying surface defining holes for accommodation of the support structure. The support structure includes a first surface and extends therebetween. The first surface includes a rising portion for supporting wafer. A center of the first surface and a center of the second surface define an axis that is not parallel to the normal of the first surface. That is, the first surface extends oblique relatively to the second surface such that the support structure according to the invention can be received in the pedestal in an oblique way relative to the wafer carrying surface of the pedestal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.