Piotech Inc.
17Patents
17Active
17Granted
52Portfolio score
Filing activity: Sep 16, 2016 → Dec 29, 2021
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11767592B2 | Gas-dispersing apparatus for multiple chemical resources | Electricity | 1 | Active |
| US11731145B2 | Multiple section showerhead assembly | Chemistry; Metallurgy | 0 | Active |
| US11437253B2 | Wafer pedestal with contact array | Electricity | 0 | Active |
| US12020975B2 | Apparatus and method for processing wafer | Electricity | 0 | Active |
| US12043897B2 | Coating device and carrier seat thereof | Chemistry; Metallurgy | 0 | Active |
| US12131938B2 | Automatic wafer carrying system and method for transferring wafer using the system | Electricity | 0 | Active |
| US12327748B2 | Semiconductor processing apparatus and method | Electricity | 0 | Active |
| US12094755B2 | Protection mechanism and method for protecting wafer and pin | Electricity | 0 | Active |
| US11990363B2 | Wafer support pin lifting device | Electricity | 0 | Active |
| US10497591B2 | Load lock chamber and the cluster tool system using the same | Electricity | 0 | Active |
| US11488802B2 | Semiconductor device for condition-controlled radio frequency system | Electricity | 0 | Active |
| US12351916B2 | Gas showerhead with controllable airflow distribution | Emerging Cross-Sectional Technologies | 0 | Active |
| US10410909B2 | Waffer pedestal and support structure thereof | Electricity | 0 | Active |
| US11562891B2 | Method of temperature measurement used in radio-frequency processing apparatus for semiconductor | Electricity | 0 | Active |
| US12146220B2 | Apparatus and method for manufacturing semiconductor film | Electricity | 0 | Active |
| US10643882B2 | Ceramic ring with a ladder structure | Electricity | 0 | Active |
| US11088012B2 | Wafer susceptor apparatus with thermal insulation and method for manufacturing the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.