Patent assignee · CN · COMPANY

Piotech Inc.

17Patents
17Active
17Granted
52Portfolio score

Filing activity: Sep 16, 2016 → Dec 29, 2021

Most-cited patents

PatentTitleAreaCited byStatus
US11767592B2 Gas-dispersing apparatus for multiple chemical resources Electricity 1 Active
US11731145B2 Multiple section showerhead assembly Chemistry; Metallurgy 0 Active
US11437253B2 Wafer pedestal with contact array Electricity 0 Active
US12020975B2 Apparatus and method for processing wafer Electricity 0 Active
US12043897B2 Coating device and carrier seat thereof Chemistry; Metallurgy 0 Active
US12131938B2 Automatic wafer carrying system and method for transferring wafer using the system Electricity 0 Active
US12327748B2 Semiconductor processing apparatus and method Electricity 0 Active
US12094755B2 Protection mechanism and method for protecting wafer and pin Electricity 0 Active
US11990363B2 Wafer support pin lifting device Electricity 0 Active
US10497591B2 Load lock chamber and the cluster tool system using the same Electricity 0 Active
US11488802B2 Semiconductor device for condition-controlled radio frequency system Electricity 0 Active
US12351916B2 Gas showerhead with controllable airflow distribution Emerging Cross-Sectional Technologies 0 Active
US10410909B2 Waffer pedestal and support structure thereof Electricity 0 Active
US11562891B2 Method of temperature measurement used in radio-frequency processing apparatus for semiconductor Electricity 0 Active
US12146220B2 Apparatus and method for manufacturing semiconductor film Electricity 0 Active
US10643882B2 Ceramic ring with a ladder structure Electricity 0 Active
US11088012B2 Wafer susceptor apparatus with thermal insulation and method for manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.