Patent · US Active

Semiconductor device

US10411088B2 · kind B2 · utility

2Cited by
1References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2018
Grant dateSep 10, 2019
Priority date
Expiry dateApr 12, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0151
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device including a substrate and a shallow trench isolation (STI) structure is provided. The substrate has a first voltage area and a second voltage area. A top surface of the substrate in the second voltage area is higher than a top surface of the substrate in the first voltage area, and a trench is defined in the substrate in between the first and second voltage area. The STI structure is located in the substrate within the trench, wherein a first portion of the STI structure is located in the first voltage area, a second portion of the STI structure is located in the second voltage area, and a step height difference exist in between a bottom surface of the first portion of the STI structure in the first voltage area and a bottom surface of the second portion of the STI structure in the second voltage area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.