Composition analysis method and composition analysis system
US10422758B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Mar 3, 2017 |
| Grant date | Sep 24, 2019 |
| Priority date | — |
| Expiry date | Mar 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A composition analysis method includes iteratively irradiating a sample with an ion beam, irradiating a specific portion of the sample that is thinned by the irradiation of the ion beam with an electron beam, and detecting an intensity of an X-ray generated from the sample by the irradiation of the electron beam. The method further includes determining an identity of an element included in the sample based on at least one detection result obtained in the iterative process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.