Patent · US Active

Probe card alignment

US10422817B2 · kind B2 · utility

1Cited by

11References

15Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Martin Eckert · Metzingen, DE
Roland Dieterle · St. Georgen, DE
Siegfried Tomaschko · Neustadt, DE

Key dates

Filing date	Oct 27, 2017
Grant date	Sep 24, 2019
Priority date	—
Expiry date	Jan 15, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.