Inspection system including parallel imaging paths with multiple and selectable spectral bands
US10429319B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2014 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | May 13, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.