Inventor · Woodside, CA, US

Daniel L. Cavan

11Patents
6h-index
17Co-inventors
63Inventor score

Filing activity: May 20, 1985 → Mar 17, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US4806774A Inspection system for array of microcircuit dies having redundant circuit patterns Physics 91 Expired
USRE33956E Inspection system for array of microcircuit dies having redundant circuit patterns General 28 Expired
US4811409A Method and apparatus for detecting defect information in a holographic image pattern Physics 24 Expired
US7227984B2 Method and apparatus for identifying defects in a substrate surface by using dithering to reconstruct under-sampled images Physics 22 Expired
US4659172A Rotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatus Physics 13 Expired
US4788431A Specimen distance measuring system Electricity 12 Expired
US6316164A Proximity effect correction method through uniform removal of fraction of interior pixels Emerging Cross-Sectional Technologies 4 Expired
US8643835B2 Active planar autofocus Physics 4 Active
US9128064B2 Super resolution inspection system Physics 1 Active
US9703207B1 System and method for reducing dynamic range in images of patterned regions of semiconductor wafers Physics 1 Active
US10429319B2 Inspection system including parallel imaging paths with multiple and selectable spectral bands Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.