Method, device and system for measuring an electrical characteristic of a substrate
US10429436B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2016 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Jan 19, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2889
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure relates to a device for measuring an electrical characteristic of a substrate comprising a support made of a dielectric material having a bearing surface, the support comprising an electrical test structure having a contact surface flush with the bearing surface of the support, the bearing surface of the support and the contact surface of the electrical test structure being suitable for coming into close contact with a substrate. The measurement device also comprises at least one connection bump contact formed on another surface of the support and electrically linked to the electrical test structure. This disclosure also relates to a system for characterizing a substrate and a method for measuring a characteristic of a substrate employing the measurement device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.