Substrate detection apparatus, substrate detection method and substrate processing system
US10429543B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2016 |
| Grant date | Oct 1, 2019 |
| Priority date | — |
| Expiry date | Jun 23, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67265
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a substrate detection apparatus of detecting whether or not a substrate is normally supported by a support part at a predetermined position, in a transfer device including the support part configured to support a plurality of disc-like substrates in multi-stage processing at vertical intervals. The substrate detection apparatus includes: a plurality of optical sensors, each of the plurality of optical sensors including a light transmitting part configured to irradiate a light and a light receiving part configured to receive the light from the light transmitting part, wherein at least one pair of the plurality of optical sensors are disposed such that the light from the light transmitting part is sequentially blocked at each of the plurality of disc-like substrates, during the plurality of disc-like substrates is collectively transferred while being normally supported by the support part at the predetermined positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.