Contact-via chain as corrosion detector

US10431507B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Daniel Schneider · Munich, DE
• Franz Dietz · Heilbronn, DE

Key dates

• Filing date: May 9, 2016
• Grant date: Oct 1, 2019
• Expiry date: May 9, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L23/585
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A detector for determining a faulty semiconductor component including a semiconductor component, a contact-via chain, which is situated laterally at a distance from the semiconductor component and which surrounds the semiconductor component in regions, a guard ring, which is situated laterally at a distance from the semiconductor component, and an evaluation unit, which is situated on the semiconductor component, wherein the evaluation unit is designed to apply an electrical voltage to the contact-via chain, in particular a permanent electrical voltage, to detect a resistance value of the contact-via chain and to produce an output signal when the resistance value of the contact-via chain exceeds a threshold value.