Patent · US Active

Systems and methods for manufacturing nano-electro-mechanical-system probes

US10436814B2 · kind B2 · utility

2Cited by
16References
8Claims
0Family size

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Key dates

Filing dateFeb 26, 2016
Grant dateOct 8, 2019
Priority date—
Expiry dateJul 31, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q70/14
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.