Apparatus having a cavity structure and method for producing same
US10442682B2 · kind B2 · utility
0Cited by
3References
29Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 21, 2018 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Mar 21, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/16225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure relates to an apparatus having a substrate arrangement with a first circuit arrangement that heats up during operation and a second circuit arrangement that is integrated into a substrate material of the substrate arrangement. Further, the apparatus has a cavity structure that is arranged between the first and the second circuit arrangement, said cavity structure being formed in the substrate material and having a pressure that is lower than an ambient atmospheric pressure. The present disclosure further relates to a method for producing such an apparatus (10).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.