Zone-controlled rare-earth oxide ALD and CVD coatings
US10443126B1 · kind B1 · utility
4Cited by
36References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2018 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Apr 6, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/855
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.