Surface defects evaluation system and method for spherical optical components
US10444160B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2015 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | Sep 9, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9583
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defects evaluation system and method are provided in the present invention. Based on the principle of the microscopic scattering dark-field imaging, the present invention implements a sub-aperture scanning for the surface of spherical optical components and then obtains surface defects information with image processing. Firstly, the present invention takes full advantage of the characteristic that the surface defects of spherical optical components can generate scattering light when an annular illumination beam irradiates on the surface, to implement the sub-aperture scanning and imaging that covers the entire spherical surface. Then, a series of procedures such as the global correction of sub-apertures, the 3D stitching, the 2D projection and the digital feature extraction are taken to inspect spherical surface defects. Finally, actual size and position information of defects are evaluated quantitatively with the defects calibration data. The present invention achieves the automatic quantitative evaluation for surface defects of spherical optical components, which considerably enhance the efficiency and precision of the inspection, avoiding the influence of subjectivity on the r…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.