Conveyance system, robot, and method for controlling robot
US10446432B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2017 |
| Grant date | Oct 15, 2019 |
| Priority date | — |
| Expiry date | May 13, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67766
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.