Patent · US Active

Integrated photo-acoustic gas sensor module

US10451543B2 · kind B2 · utility

4Cited by
15References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 11, 2016
Grant dateOct 22, 2019
Priority date
Expiry dateFeb 23, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48247
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A photo-acoustic gas sensor is disclosed. The photo-acoustic gas sensor includes a substrate, a light emitter unit supported by the substrate, the light emitter unit including a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit supported by the substrate, the detector unit including a microphone, wherein the beam of light pulses traverses an area intended to accommodate the gas and the microphone can receive a signal oscillating with the repetition frequency.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.