Sample shape measuring method and sample shape measuring apparatus
US10458781B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2018 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Jul 6, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/086
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A sample shape measuring method includes a step of preparing illumination light passing through a predetermined illumination region, a step of applying the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that the illumination light is applied to part of inside of a pupil and outside of the pupil, a light intensity of the illumination light incident on the predetermined illumination region differs between a center and a periphery. The predetermined processing step includes a step of receiving light transmitted through the observation optical system, a step of obtaining a quantity of light of the received light, a step of calculating a difference or a ratio between the quantity of light and a reference quantity of light, and a step of calculating an amount of tilt in a surface of the sample from the difference or the ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.