Inspection apparatus and inspection method
US10458924B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 4, 2016 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Jul 4, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defect inspection apparatus includes a light irradiation unit irradiating a sample placed on a table unit with illumination light, a detection optical system forming a scattered light image from the sample and detecting the generated scattered light image through an image sensor, a processing unit receiving a signal from the image sensor of the detection optical system that detects the scattered light image, generating an image of the scattered light, and detecting a defect of the sample by processing the generated image, an output unit outputting the defect image processed by the image processing unit, and a control unit controlling the stable unit, the light irradiation unit, the detection optical system, and the image processing unit. The image processing unit includes an image generation unit that receives the signal and generates the image, a correction unit that corrects lightness discontinuity and a defect detection unit for image processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.