Patent assignee · JP · COMPANY

Hitachi High-Technologies Corporation

2,894Patents
2,454Active
2,894Granted
62Portfolio score

Filing activity: Mar 9, 2000 → Apr 29, 2022 · 1,213 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
USD557226S1 Electrode cover for a plasma processing apparatus General 597 Expired
US8497213B2 Plasma processing method Electricity 450 Active
USD840364S1 Electrode cover for a plasma processing apparatus General 430 Active
USD556704S1 Grounded electrode for a plasma processing apparatus General 427 Expired
USD827592S1 Electrode cover for a plasma processing apparatus General 422 Active
US6875477B2 Method for coating internal surface of plasma processing chamber Chemistry; Metallurgy 371 Expired
USD614192S1 Graphical user interface for a computer display General 292 Expired
USD614191S1 Graphical user interface for a computer display General 290 Expired
USD633514S1 Computer display with graphical user interface General 183 Expired
US7364956B2 Method for manufacturing semiconductor devices Electricity 163 Expired
USD630649S1 Graphical user interface for a computer display General 160 Expired
USD523153S1 Main part for immunity analysis machine General 142 Expired
USD602496S1 Graphical user interface for a computer display General 126 Expired
US8304725B2 Charged particle beam system Electricity 111 Active
US7388979B2 Method and apparatus for inspecting pattern defects Physics 107 Active
USD630645S1 Graphical user interface for a computer display General 102 Expired
USD630648S1 Graphical user interface for a computer display General 101 Expired
US7761246B2 Surface inspection method and surface inspection apparatus Physics 96 Active
USD770992S1 Electrode cover for a plasma processing apparatus General 92 Active
USD595420S1 Adapter for a sample rack General 91 Expired
USD595421S1 Adapter for a sample rack General 89 Expired
US8779400B2 Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample Electricity 88 Active
USD595863S1 Adapter for a sample rack General 87 Expired
US7738916B2 Portable terminal device with built-in fingerprint sensor Physics 85 Expired
USD652839S1 Graphical user interface for a computer display General 80 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.