Method for manufacturing a detection device with two substrates and such a detection device
US10461210B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 1, 2018 |
| Grant date | Oct 29, 2019 |
| Priority date | — |
| Expiry date | Aug 1, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F71/139
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for manufacturing a device (1) for detecting electromagnetic radiation. The method comprises the steps of: supplying a first substrate (400) comprising a reading circuit (340), at least two first contact plugs (343, 344) and at least one first annular bonding element (345) surrounding the first contact plugs (343, 344); supplying a second substrate comprising a cap (210), an annular side wall forming with the cap (210) a cavity filled with a sacrificial material and a detection structure (100) housed in the cavity. The method further comprising the steps of bonding the second substrate (200) on the first substrate (400); arranging at least one opening (212) in the second substrate (200); selective elimination of the sacrificial material; and closing the opening (212) under at least a primary vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.