Method and apparatus for controlled broadband microwave heating
US10470256B2 · kind B2 · utility
1Cited by
24References
17Claims
0Family size
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Key dates
| Filing date | Apr 16, 2013 |
| Grant date | Nov 5, 2019 |
| Priority date | — |
| Expiry date | Oct 25, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/80
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A materials processing system comprises a thermal processing chamber and a broadband microwave power source. The power source includes an ovenized small-signal RF circuit, a high power microwave amplifier, and forward and reflected power detectors separated from one another by an isolator. The power detectors are also preferably ovenized. A control system provides control signals to the thermally stabilized VCO and VCA in the small-signal circuit to control output power based on detected forward power compared to demanded forward power. The system may be run in either open-loop or closed-loop modes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.