Stochastically-aware metrology and fabrication
US10474042B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2017 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | Jun 2, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0294
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for stochastically-aware metrology includes a controller to be communicatively coupled to a fabrication tool. The controller receives a production recipe including at least a pattern of elements to be fabricated on a sample and one or more exposure parameters for exposing the pattern of elements, identifies candidate care areas of the pattern of elements susceptible to stochastic repeaters including fabrication defects predicted to occur stochastically when fabricated according to the production recipe, selects one or more care areas from the candidate care areas by comparing one or more predicted likelihoods of the one or more stochastic repeaters to a defect likelihood threshold, modifies the production recipe to mitigate the stochastic repeaters within the one or more care areas within a selected tolerance, and directs the fabrication tool to fabricate at least one sample according to the modified production recipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.