Drawing device and drawing method
US10475621B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2018 |
| Grant date | Nov 12, 2019 |
| Priority date | — |
| Expiry date | May 29, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30416
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.