Inventor · Yokohama, JP

Hayato Kimura

13Patents
2h-index
20Co-inventors
50Inventor score

Filing activity: Oct 29, 2001 → Jun 5, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7589335B2 Charged-particle beam pattern writing method and apparatus and software program for use therein Performing Operations; Transporting 6 Active
US10969400B2 Semiconductor device, angle value correction circuit and method therefor Emerging Cross-Sectional Technologies 2 Active
US7598504B2 Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus Performing Operations; Transporting 2 Active
US7476881B2 Charged beam drawing apparatus and charged beam drawing method Electricity 2 Active
US7900185B2 Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus Physics 1 Active
US7057157B2 Photosensor device and disk inspection apparatus using it Physics 1 Expired
US10483087B2 Multi charged particle beam writing apparatus and multi charged particle beam writing method Electricity 1 Active
US8892971B2 Output control scan flip-flop, semiconductor integrated circuit including the same, and design method for semiconductor integrated circuit Physics 1 Active
US9953800B2 Multi-charged particle beam writing apparatus and multi-charged particle beam writing method Electricity 0 Active
US9934935B2 Multi charged particle beam writing apparatus and multi charged particle beam writing method Electricity 0 Active
US10886103B2 Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus Electricity 0 Active
US10475621B2 Drawing device and drawing method Electricity 0 Active
US10109454B2 Diagnosis method, charged particle beam lithography apparatus, and recording medium Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.