Hayato Kimura
13Patents
2h-index
20Co-inventors
50Inventor score
Filing activity: Oct 29, 2001 → Jun 5, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7589335B2 | Charged-particle beam pattern writing method and apparatus and software program for use therein | Performing Operations; Transporting | 6 | Active |
| US10969400B2 | Semiconductor device, angle value correction circuit and method therefor | Emerging Cross-Sectional Technologies | 2 | Active |
| US7598504B2 | Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | Performing Operations; Transporting | 2 | Active |
| US7476881B2 | Charged beam drawing apparatus and charged beam drawing method | Electricity | 2 | Active |
| US7900185B2 | Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus | Physics | 1 | Active |
| US7057157B2 | Photosensor device and disk inspection apparatus using it | Physics | 1 | Expired |
| US10483087B2 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Electricity | 1 | Active |
| US8892971B2 | Output control scan flip-flop, semiconductor integrated circuit including the same, and design method for semiconductor integrated circuit | Physics | 1 | Active |
| US9953800B2 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Electricity | 0 | Active |
| US9934935B2 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Electricity | 0 | Active |
| US10886103B2 | Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus | Electricity | 0 | Active |
| US10475621B2 | Drawing device and drawing method | Electricity | 0 | Active |
| US10109454B2 | Diagnosis method, charged particle beam lithography apparatus, and recording medium | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.