Patent · US Active

Method and apparatus for surface nanoparticle measurement

US10478868B2 · kind B2 · utility

0Cited by

8References

17Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventor

Thomas Nowak · Staufenberg, DE

Key dates

Filing date	Nov 11, 2016
Grant date	Nov 19, 2019
Priority date	—
Expiry date	Jul 22, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N2015/1486
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Embodiments described herein generally relate to a particle collection apparatus and probe head for the collection of particles on process tool components. In one embodiment, a particle collection apparatus for counting particles present on a processing tool component is disclosed herein. The particle collection apparatus includes a particle collector. The particle collector is configured to scan a processing tool component and collect particles collected from the processing tool component. The particle collector includes a body and a probe head coupled to the body. The probe head has a probe body and a controlled spacing element. The controlled spacing element is coupled to the probe body and is configured to form a uniform manifold between the probe body and the processing tool component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.