Pneumatic actuator and method for operating an active vibration isolation system

US10480609B2 · kind B2 · utility

Assignee

• Integrated Dynamics Engineering GmbH · DE

Inventors

• Arndt Evers · Oestrich-Winkel, DE
• Frank Hofmann · Solingen, DE
• Han Hartgers · Mainz, DE
• Till Scharf · Heusenstamm, DE

Key dates

• Filing date: Jun 9, 2017
• Grant date: Nov 19, 2019
• Expiry date: Jun 9, 2037

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16F15/046
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.