Integrated Dynamics Engineering GmbH
41Patents
34Active
41Granted
52Portfolio score
Filing activity: Jul 5, 2000 → May 3, 2021 · 16 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6468022B1 | Edge-gripping pre-aligner | Emerging Cross-Sectional Technologies | 24 | Expired |
| US7234913B2 | Fast swapping station for wafer transport | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7264436B2 | Robot-guidance assembly for providing a precision motion of an object | Emerging Cross-Sectional Technologies | 9 | Expired |
| US9618076B2 | Stationary vibration isolation system and method for controlling a vibration isolation system | Mechanical Engineering; Lighting; Heating | 7 | Active |
| US7400392B2 | Apparatus for handling of a disklike member, especially for handling of a wafer | Physics | 6 | Expired |
| US7942379B2 | Active vibration isolation system with a combined position actuator | Physics | 5 | Active |
| US7075772B2 | Electrostatic gripping device | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7859259B2 | Magnetic filed compensation system with increased bandwidth | Physics | 4 | Active |
| US8387958B2 | Vibration isolator for use in a vacuum | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US8541911B2 | Magnetic actor and a method for its installation | Emerging Cross-Sectional Technologies | 3 | Active |
| US8592777B2 | Integrable magnetic field compensation for use in scanning and transmission electron microscopes | Electricity | 3 | Active |
| US8256735B2 | Supporting device for supporting vibration sensitive components | Physics | 3 | Active |
| US7489987B2 | Control of an active vibration isolation system | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US7290642B2 | Magnetic spring device with negative stiffness | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US7991566B2 | Device for monitoring the relative positions of several devices | Physics | 2 | Active |
| US8281911B2 | Active vibration isolation system which is more effective against seismic vibration | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US7822509B2 | Control system for active vibration isolation of a supported payload | Physics | 1 | Active |
| US9869364B2 | Vibration isolator with pneumatic spring | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US10634210B2 | Isolator for a stationary vibration isolation system | Physics | 1 | Active |
| US10322919B2 | Maintenance apparatus | Electricity | 1 | Active |
| US8894052B2 | Active oscillation isolation system by means of a hysteresis-free pneumatic bearing | Physics | 1 | Active |
| US8751050B2 | Combined motion control system | Physics | 1 | Active |
| US7269995B2 | Method and apparatus of vibration isolation, in particular for electron beam metrology tools | Electricity | 1 | Expired |
| US8433545B2 | Compensation of electromagnetic interfering fields | Physics | 1 | Active |
| US8170225B2 | Method for adapting a vibration isolation system | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.