Patent assignee · DE · COMPANY

Integrated Dynamics Engineering GmbH

41Patents
34Active
41Granted
52Portfolio score

Filing activity: Jul 5, 2000 → May 3, 2021 · 16 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6468022B1 Edge-gripping pre-aligner Emerging Cross-Sectional Technologies 24 Expired
US7234913B2 Fast swapping station for wafer transport Emerging Cross-Sectional Technologies 17 Expired
US7264436B2 Robot-guidance assembly for providing a precision motion of an object Emerging Cross-Sectional Technologies 9 Expired
US9618076B2 Stationary vibration isolation system and method for controlling a vibration isolation system Mechanical Engineering; Lighting; Heating 7 Active
US7400392B2 Apparatus for handling of a disklike member, especially for handling of a wafer Physics 6 Expired
US7942379B2 Active vibration isolation system with a combined position actuator Physics 5 Active
US7075772B2 Electrostatic gripping device Emerging Cross-Sectional Technologies 5 Expired
US7859259B2 Magnetic filed compensation system with increased bandwidth Physics 4 Active
US8387958B2 Vibration isolator for use in a vacuum Mechanical Engineering; Lighting; Heating 3 Active
US8541911B2 Magnetic actor and a method for its installation Emerging Cross-Sectional Technologies 3 Active
US8592777B2 Integrable magnetic field compensation for use in scanning and transmission electron microscopes Electricity 3 Active
US8256735B2 Supporting device for supporting vibration sensitive components Physics 3 Active
US7489987B2 Control of an active vibration isolation system Mechanical Engineering; Lighting; Heating 3 Active
US7290642B2 Magnetic spring device with negative stiffness Mechanical Engineering; Lighting; Heating 3 Expired
US7991566B2 Device for monitoring the relative positions of several devices Physics 2 Active
US8281911B2 Active vibration isolation system which is more effective against seismic vibration Mechanical Engineering; Lighting; Heating 1 Active
US7822509B2 Control system for active vibration isolation of a supported payload Physics 1 Active
US9869364B2 Vibration isolator with pneumatic spring Mechanical Engineering; Lighting; Heating 1 Active
US10634210B2 Isolator for a stationary vibration isolation system Physics 1 Active
US10322919B2 Maintenance apparatus Electricity 1 Active
US8894052B2 Active oscillation isolation system by means of a hysteresis-free pneumatic bearing Physics 1 Active
US8751050B2 Combined motion control system Physics 1 Active
US7269995B2 Method and apparatus of vibration isolation, in particular for electron beam metrology tools Electricity 1 Expired
US8433545B2 Compensation of electromagnetic interfering fields Physics 1 Active
US8170225B2 Method for adapting a vibration isolation system Physics 1 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.