Composite MEMS flow sensor on silicon-on-insulator device and method of making the same
US10480974B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2018 |
| Grant date | Nov 19, 2019 |
| Priority date | — |
| Expiry date | Aug 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/696
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.