Patent assignee · US · COMPANY

Siargo Ltd.

20Patents
19Active
20Granted
49Portfolio score

Filing activity: Jun 21, 2005 → Aug 17, 2022 · 11 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8342018B2 High accuracy battery-operated MEMS mass flow meter Physics 13 Active
US7780343B2 Micromachined gas and liquid concentration sensor and method of making the same Physics 12 Active
US7536908B2 Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods Physics 11 Expired
US8242024B2 Method of forming metal interconnection on thick polyimide film Electricity 9 Active
US7797997B2 Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor Physics 9 Active
US7765679B2 Method of manufacturing a flow rate sensor Emerging Cross-Sectional Technologies 9 Active
US7878056B2 Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same Physics 7 Active
US7908096B2 Integrated micromachined thermal mass flow sensor and methods of making the same Physics 7 Active
US8794082B2 MEMS time-of-flight thermal mass flow meter Physics 5 Active
US7752910B2 Micromachined mass flow sensor and methods of making the same Physics 5 Active
US10480974B2 Composite MEMS flow sensor on silicon-on-insulator device and method of making the same Physics 2 Active
USD1032386S1 MEMS mass flow controller General 2 Active
US10240723B2 Digital regulated gas dispensing apparatus with a MEMS mass flow meter Mechanical Engineering; Lighting; Heating 2 Active
US8644693B2 Integrated micromachining proximity switch sensors in air/oil lubricators Physics 1 Active
US10837814B1 Smart gas cylinder cap Mechanical Engineering; Lighting; Heating 1 Active
US8464593B2 Integrated micro-machined air flow velocity meter for projectile arms Physics 0 Active
US10908006B2 Method for forming micromachined liquid flow sensor Physics 0 Active
US8544320B2 Integrated micromachined wind and gas velocity profiler Physics 0 Active
US11927555B2 Micromachined thermal time-of-flight fluidic concentration metering device Physics 0 Active
US8336392B2 Integrated micromachining air flow path clog sensor Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.