Seed chuck assemblies and crystal pulling systems for reducing deposit build-up during crystal growth process
US10487418B2 · kind B2 · utility
3Cited by
9References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2017 |
| Grant date | Nov 26, 2019 |
| Priority date | — |
| Expiry date | Jan 5, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Crystal pulling systems for growing monocrystalline ingots from a melt of semiconductor or solar-grade material are described. The crystal pulling systems include seed chuck assemblies designed to reduce formation of deposits on components of the crystal pulling systems by reducing and inhibiting the formation of gas flow recirculation cells within the crystal pulling systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.