Characterizing a height profile of a sample by side view imaging
US10488434B2 · kind B2 · utility
1Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2018 |
| Grant date | Nov 26, 2019 |
| Priority date | — |
| Expiry date | Jul 27, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope, in particular an atomic force microscope, for analyzing a sample by moving a probe and the sample relative to one another, wherein the scanning probe microscope includes a detection unit with a side view camera arranged and configured for detecting an image of the sample in a substantially horizontal side view, and a determining unit for determining information indicative of a profile of at least part of a surface of the sample based on the detected image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.