Cryopump hybrid frontal array
US10495079B2 · kind B2 · utility
1Cited by
8References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 20, 2016 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Jun 9, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array that is also cooled by the refrigerator. The frontal array comprises louvers across an otherwise substantially open center region of the frontal opening and an orifice plate across an outer region of the frontal opening. The hybrid frontal array allows for pumping speeds approximating those of a louver frontal array but with flow control comparable to an orifice plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.