Edwards Vacuum LLC
41Patents
35Active
41Granted
54Portfolio score
Filing activity: Dec 1, 2000 → Nov 16, 2021 · 3 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11175075B2 | Systems and methods for warming a cryogenic heat exchanger array, for compact and efficient refrigeration, and for adaptive power management | Mechanical Engineering; Lighting; Heating | 18 | Active |
| US7398127B2 | Systems and methods for facilitating wireless communication between various components of a distributed system | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7541061B2 | Vacuum chamber load lock structure and article transport mechanism | Emerging Cross-Sectional Technologies | 3 | Expired |
| US9888526B2 | Detecting heater failure in a group of electric heaters in a process equipment heating system | Electricity | 3 | Active |
| US7438534B2 | Wide range pressure control using turbo pump | Mechanical Engineering; Lighting; Heating | 2 | Active |
| US7539459B2 | Active noise cancellation system, arrangement, and method | Physics | 2 | Expired |
| US7500822B2 | Combined vacuum pump load-lock assembly | Mechanical Engineering; Lighting; Heating | 1 | Expired |
| US10495079B2 | Cryopump hybrid frontal array | Emerging Cross-Sectional Technologies | 1 | Active |
| US7625540B2 | Fluorine removal by ion exchange | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7404698B2 | Turbomolecular pump with static charge control | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US11215384B2 | System and method for cryogenic cooling | Emerging Cross-Sectional Technologies | 0 | Active |
| US7470413B2 | Fluorine removal by ion exchange | Emerging Cross-Sectional Technologies | 0 | Expired |
| US12320710B2 | Vacuum apparatus temperature sensor assembly | Physics | 0 | Active |
| US10845229B2 | Monitoring system and method | Physics | 0 | Active |
| US10550829B2 | Ion trajectory manipulation architecture in an ion pump | Electricity | 0 | Active |
| US11466673B2 | Cryopump with peripheral first and second stage arrays | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11415263B2 | Conversion kit for a support frame, a support frame and an integrated vacuum system mounted in a support frame | Performing Operations; Transporting | 0 | Active |
| US10632399B2 | Multi-refrigerator high speed cryopump | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12014913B2 | Reducing plasma formation in an ion pump | Electricity | 0 | Active |
| US8636019B2 | In-situ removal of semiconductor process residues from dry pump surfaces | Chemistry; Metallurgy | 0 | Active |
| US12181191B2 | Pressure regulated semiconductor wafer cooling apparatus and method and a pressure regulating apparatus | Electricity | 0 | Active |
| USD944070S1 | Clamp | General | 0 | Active |
| US11931682B2 | Waste gas abatement technology for semiconductor processing | Emerging Cross-Sectional Technologies | 0 | Active |
| US12106950B2 | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump | Electricity | 0 | Active |
| US11732931B2 | Pneumatic drive cryocooler | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.