Patent · US Active

Photoacoustic gas sensor device and a method for analyzing gas

US10495612B2 · kind B2 · utility

6Cited by

14References

17Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Stefan Kolb · Unterschleißheim, DE
Horst Theuss · Wenzenbach, DE

Key dates

Filing date	Nov 2, 2016
Grant date	Dec 3, 2019
Priority date	—
Expiry date	Nov 2, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/021
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A photoacoustic gas sensor device for analyzing gas includes an emitter module and a pressure-sensitive module. The emitter module is arranged on a carrier substrate and emits light pulses. The pressure-sensitive module is arranged on the carrier substrate within a reference gas volume. The reference gas volume is separated from a volume intended to be filled with a gas to be analyzed. Further, the pressure-sensitive module generates a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume. Additionally, the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.