Micromechanical device having a first cavity and a second cavity
US10501311B2 · kind B2 · utility
1Cited by
2References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2018 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Jun 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/1461
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micromechanical device having a first cavity, which has a MEMS element, and having a second cavity. The second cavity is connected to the first cavity with a connection channel, the connection channel having a seal by which the first cavity and the second cavity are hermetically sealed from each other, the seal being able to be opened electrically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.