Attachment of nano-objects to beam-deposited structures
US10501851B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jun 21, 2016 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Aug 26, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31732
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Beam-induced deposition decomposes a precursor at precise positions on a surface. The surface is processed to provide linker groups on the surface of the deposit, and the sample is processed to attach nano-objects to the linker groups. The nano-objects are used in a variety of application. When a charged particle beam is used to decompose the precursor, the charged particle beam can be used to form an image of the surface with the nano-objects attached.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.