Inertia sensor and method of manufacturing the same
US10502758B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2016 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Apr 2, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0862
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE1, VE2 and fixed electrodes FE1, FE2, the fixed electrodes are formed by portions surrounded by a through hole TH1 provided in a cap layer CL, and the through hole is filled with an insulating film IF1 and polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IF1 and the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.