Tatsuyuki Saito
62Patents
11h-index
63Co-inventors
77Inventor score
Filing activity: Apr 13, 2000 → Oct 2, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6731007B1 | Semiconductor integrated circuit device with vertically stacked conductor interconnections | Electricity | 43 | Expired |
| US6818546B2 | Semiconductor integrated circuit device and a method of manufacturing the same | Electricity | 34 | Expired |
| USD655255S1 | Boat of wafer processing apparatus | General | 28 | Expired |
| US6838772B2 | Semiconductor device | Electricity | 26 | Expired |
| USD655682S1 | Boat of wafer processing apparatus | General | 26 | Expired |
| US6764950B2 | Fabrication method for semiconductor integrated circuit device | Electricity | 25 | Expired |
| US6908847B2 | Method of manufacturing a semiconductor device having an interconnect embedded in an insulating film | Electricity | 23 | Expired |
| US7323781B2 | Semiconductor device and manufacturing method thereof | Electricity | 22 | Expired |
| US7232757B2 | Semiconductor integrated circuit device and fabrication method for semiconductor integrated circuit device | Electricity | 18 | Expired |
| US6861756B2 | Semiconductor integrated circuit device and fabrication process thereof | Electricity | 13 | Expired |
| US7053487B2 | Semiconductor device | Electricity | 11 | Expired |
| US6426255B1 | Process for making a semiconductor integrated circuit device having a dynamic random access memory | Electricity | 11 | Expired |
| US8384220B2 | Semiconductor integrated circuit device and fabrication process thereof | Electricity | 10 | Active |
| US8808455B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 9 | Active |
| US6864169B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 9 | Expired |
| US7387957B2 | Fabrication process for a semiconductor integrated circuit device | Electricity | 8 | Expired |
| US7321171B2 | Semiconductor integrated circuit device | Electricity | 7 | Expired |
| US9064870B2 | Semiconductor device and manufacturing method thereof | Electricity | 6 | Active |
| US6764945B2 | Method of manufacturing a multilayer metallization structure with non-directional sputtering method | Electricity | 6 | Expired |
| US8053893B2 | Semiconductor device and manufacturing method thereof | Electricity | 5 | Active |
| US6716749B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 5 | Expired |
| US8857890B2 | Driving apparatus for opening and closing body for vehicle | Emerging Cross-Sectional Technologies | 5 | Active |
| US6797609B2 | Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device | Electricity | 4 | Expired |
| US7642652B2 | Semiconductor integrated circuit device and a method of manufacturing the same | Electricity | 4 | Active |
| US8431480B2 | Semiconductor device and manufacturing method thereof | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.