Method and apparatus of operating a scanning probe microscope
US10502761B2 · kind B2 · utility
1Cited by
23References
7Claims
0Family size
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Key dates
| Filing date | Mar 3, 2017 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Mar 3, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.