Method for generating a composite image of an object and particle beam device for carrying out the method
US10504691B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2017 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Apr 19, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/226
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The system described herein relates to a method for generating a composite image of an object using, for example, a particle beam device such as an electron beam device and/or an ion beam device. A composite image is generated by relatively arranging a first sub image to a second sub image such that the first sub image overlaps the second sub image in the entire common region, a calculated first image position of a first marking in the first sub image is arranged on the first image position of the first marking in the second sub image, and a calculated second image position of a second marking in the first sub image is arranged on the second image position of the second marking in the second sub image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.