Semiconductor device with substrate temperature monitor circuit
US10505518B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2015 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Apr 7, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F55/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
First and second circuits, a photocoupler and a substrate temperature monitor circuit are formed on a substrate. A photocoupler includes a primary-side light emitting diode that converts an electric signal received from the first circuit into an optical signal, and a light receiving device that converts the optical signal into an electric signal and outputs the electric signal to the second circuit. The substrate temperature monitor circuit reads a Vf voltage value of the primary-side light emitting diode of the photocoupler to monitor temperature of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.