Patent · US Active

Vacuum conveyor substrate loading module

US10507991B2 · kind B2 · utility

4Cited by

10References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Asaf Schlezinger · Sunnyvale, US
Markus J. Stopper · Hergolding, DE

Key dates

Filing date	Jul 10, 2018
Grant date	Dec 17, 2019
Priority date	—
Expiry date	Jul 10, 2038

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/50
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection system is provided that includes a first conveyor module, and a second conveyor module having a movable surface positioned substantially parallel to a movable surface of the first conveyor module, wherein the first conveyor module includes a first section and a second section, the first section having a vacuum unit operable to secure a substrate to a portion of the movable surface in the first section, and the second section is configured to release the substrate from the movable surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.