Mounting arrangement for an optical imaging arrangement

US10520838B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Dirk Schaffer · Jena, DE
• Jens Prochnau · Oberkochen, DE

Key dates

• Filing date: Nov 15, 2018
• Grant date: Dec 31, 2019
• Expiry date: Nov 15, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A connection arrangement for connecting an optical component of an optical imaging arrangement to a support unit of a support structure includes: a connecting element unit having a support interface end with support interface section; and a component interface end with a component interface section.