Shape measurement apparatus and shape measurement method
US10527410B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2017 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Jan 19, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/892
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
[Object] To provide a shape measurement apparatus that is capable of detecting minute roughness irregularity at high speed across the entire width on the entire surface of a measurement object.[Solution] Provided is a shape measurement apparatus including: a light source configured to irradiate a surface of a moving strip-shaped body with linear light diagonally from an upstream side in a movement direction of the strip-shaped body; a screen configured such that reflected light of the linear light on the surface of the strip-shaped body is projected on the screen; an imaging unit configured to image the reflected light of the linear light projected on the screen; and an arithmetic processing unit configured to acquire surface roughness distribution of the strip-shaped body on the basis of width distribution of a light strip of the reflected light of the linear light projected on the screen. The angle of incidence of the light source with respect to the strip-shaped body is set in accordance with target surface roughness of the surface of the strip-shaped body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.